Therma Wave

OPTI PROBE

Used system :

As is where is

or

Tested working 

or

Refurbished

or

refurbished with warranty

installation possible

We propose a indexer for swift pot upgrade for

older OPTI PROBES please contact us

The Therma-Wave Opti-Probe 2600 and 2690 are used for measurement of a wide range of optical parameters such as film thickness of multiple layers and index of refraction. Compatible with wafers ranging from 4- to 8-inches, the system has two cassette loader stations. The Opti-Probe supports Beam Profile Reflectrometry (BPR) and Beam Profile Ellipsometry (BPE) modes. A 675 nm thermoelectrically cooled diode laser is used to establish the optical parameter and in spectrometry mode a visible 450 to 840 nm tungsten halogen lamp it used.

• Supports the full range of thick and thin film, refractive indexes, extinction coefficient and reflectivity measurements
• Multi-layer and multi-parameter measurements on thin ONO and OPO film stacks
• Small micro-ellipsometer spot size (0.9 micron) eliminates under- and over-polishing
• Enables control of polish rate and detection of polish slopes on areas as small as 7 micron x 7 micron
• Spectrometer light source is can be changed in 15 minutes without any optics recalibration
• Long-life light sources eliminate frequent changes and requalification

BPR (Beam Profile Reflectometry : thick dielectric films > 500A)

BPE (Beam Profile Ellipsometry : thin dielectric films < 500A)

Spectrometry (High Index films : C-Si, Poly-Si, A-Si)

?

Tag: Therma wave laser refurbishment therma wave spectrometer bulb therma wave uv bulb therma wave duv bubl therma wave spare parts service Therma wave laser refurbishment therma wave spectrometer bulb therma wave uv bulb therma wave duv bubl therma wave spare parts service? Therma wave laser refurbishment therma wave spectrometer bulb therma wave uv bulb therma wave duv bubl therma wave spare parts service?