SEM FEI XL40 FEG?

Windows NT
MCtrl version 6.0
Fully integrated image storage
ET type Secondary Electron Detector
FEI (Philips) Solid State BSD detector
CCD Chamber scope
35 degree X-Ray takeoff angle
3nm at 30kV; 15nm at 1kV
Magnification range: 10x to 400,000x
Accelerating Voltage: 0.2 to 30kV
Stage & Specimen Handling:
Drawer type door
5 axis stage (XYZRT) ­ XYR motorized
150mm motorized travel in X and Y
Manual Tilt and Z
External Z adjust of 37mm
Maximum free space of 55mm for thick specimens
Interior chamber size 379mm x 325mmx 315mm
EDAX (DX-4) system
Neslab chiller and pump included
1996 vintage.
?